SECAP to Install 300 mm Electroplating Bumping Line in Asia Open to the Industry

SECAP Drives Packaging Technology With Complete 300 mm Line Running in High-Volume Production Environment


SAN FRANCISCO, Calif.- July 22, 2002- The Semiconductor Equipment Consortium for Advanced Packaging (SECAP) announced at SEMICON West 2002 that it will install a complete 300 mm line for wafer bumping and wafer-level packaging (WLP) in Asia using electroplating technology. The line will be installed at the facility of Unitive Inc.'s affiliated company UST located in Hsinchu, Taiwan and is set up to demonstrate and provide high-volume manufacturing capability. This is the first fully integrated 300 mm line of its kind for SECAP specifically targeted at WLP equipment optimization and product harmonization for high-volume production. The SECAP 300 mm line will be installed in the fourth quarter of 2002 and operations will begin in the first quarter, 2003.

The 300 mm line will be available to customers and prospective customers of the SECAP member companies for equipment demonstration and evaluation of process technology, including integrated device manufacturers (IDMs), foundries and merchant bump foundries (post-foundries). The line will further be available to SECAP associate members (material suppliers) for advanced research and design of new packaging materials.

"The industry's transition to 300 mm technology thus far has focused heavily on front-end equipment and process issues," commented Franz Richter, SUSS MicroTec CEO. "But back-end processes also need to be performed at the wafer-level. Interest in 300 mm process equipment for wafer bumping and wafer-level packaging has increased significantly in the last 12 months, not only for microprocessors including FPGAs, ASICs, graphical chip sets and memory devices. SECAP believes that Unitive is the ideal partner for this project because Unitive is already using SECAP equipment in its 200 mm lines and has a leading electroplating and redistribution technology. Therefore, qualification of SECAP 300 mm equipment for the Unitive process will prove the capability of SECAP equipment for the most demanding wafer-level packaging technology. The entire industry will benefit from this project."

The SECAP line enables member companies to further optimize their equipment for the integrated process flow of typical wafer bumping lines. A seamless process flow is crucial for a successful move to WLP, since different equipment technologies cannot be viewed in isolation because of the interdependency and integration required to establish a complete process line.

"The SECAP line harmonizes the different types of equipment and processes used for advanced packaging and features electroplating as the enabling method of solder bump deposition," said Ray Thompson, Semitool CEO. "The lithography process, for example, cannot be addressed independently of the metallization techniques nor template removal steps. All processes influence each other so it is important to work toward an integrated and cost-effective approach. The added complexity of 300 mm challenges equipment companies to integrate solutions together with our customers."

"Electroplating will become particularly important for 300 mm technology, and Unitive's Xtreme wafer-level chip scale packaging offers the industry highest cost savings for manufacturing these large wafer sizes," commented Ken Donahue, CEO for Unitive. "The transition from 200 mm to 300 mm is a challenging project for bump foundries. The cooperation with SECAP allows us to directly transfer our technology to 300 mm with the same proven equipment suppliers from our 200 mm lines. In addition it will enable IDMs and foundries to qualify technology and equipment for 300 mm wafers."

"We are very pleased to partner with SECAP and to participate in creating the leading world class 300 mm electroplated bumping line in our facility," added Daniel Teng, president of Unitive Taiwan. "We will emphasize our focus on volume manufacturing to rapidly bring viable solutions to the marketplace in response to our customers demand.

While terms of the agreement were not disclosed, SECAP announced this will be a joint venture between Unitive and the equipment suppliers within SECAP. The equipment suppliers within SECAP will participate in the line with installation of their latest 300 mm equipment, including SECAP's newest member NEXX Systems. Unitive will invest in equipment, ancillary support equipment and infrastructure to support the line.

According to the SECAP charter, SECAP will remain neutral to all packaging technologies; as such Unitive will not become a member of SECAP. The SECAP consortium does not intend to develop or market packaging technologies, since its purpose is to create a non-competitive environment for its customers. The consortium seeks to offer a new and powerful kind of partnership to customers. With wafer-level packaging being a new technology, it requires a strong infrastructure. All companies within the consortium will remain independent, marketing their own solutions in their established business environment.

About SECAP
Established in July 2000, "SECAP" (Semiconductor Equipment Consortium for Advanced Packaging) is a consortium of leading equipment suppliers to the advanced packaging industry. Members of SECAP are Semitool, Suss MicroTec, Image Technology, Matrix Integrated Systems, NEXX Systems, Electroglas and the Fraunhofer Institute for Reliability and Microintegration (IZM) in Berlin. SECAP addresses challenges in semiconductor packaging, such as the development and validation of process equipment for the industry's conversion to wafer level packaging and 300 mm wafer technology. Within the consortium, the Fraunhofer Institute (IZM) in Berlin acts as a consultant and technical link between the equipment suppliers to identify specific equipment requirements. In addition, the Fraunhofer Institute is the application center for process sequence integration between the different partners' equipment and operates the SECAP process line. The SECAP consortium does not intend to develop and market packaging technologies, since its purpose is not to create a competitive situation with the customers of the equipment companies involved. SECAP aims at supporting the development and successful adaptation of advanced packaging technologies in the semiconductor industry. For more information, see www.secap.org.

About Unitive, Inc.
Unitive is the leading provider of wafer-level packaging solutions that make semiconductors smaller, faster and lighter. The manufacturing factories are located in N.C., USA and its affiliated company UST, located in Taiwan. The company partners with its customers to meet their product and global manufacturing needs through innovative deployment of its technologies, resulting in quicker time-to-market and lower costs. Unitive's services include wafer level multi-level passivation and thin film wiring, solder bumping, and chip scale packaging. The company's strategic investors include leading financial and industry pioneers such as Onex, Celestica, Flextronics, Fairchild Semiconductor, and Conexant Systems. For more information, please visit www.unitive.com.