SUSS MicroTec´s Image Technology Division Expands Photomask Operations Into Asia

Munich, Germany/Hsin-Chu Industrial Park, Taiwan-–June 17, 2002-–SUSS MicroTec´s wholly owned subsidiary Image Technology, Inc. (ITI), today announced the expansion of its precision photomask operations into Taiwan. The move enables Image Technology to locally manufacture 9-inch and 14-inch masks for the full field exposure of 200-mm and 300-mm wafers on SUSS MicroTec´s full field mask aligners. The new facility will begin operations by the fourth quarter of 2002.

Full-field lithography is the technology of choice for advanced packaging applications, including wafer-level bumping and redistribution processes. SUSS mask aligners, designed specifically for advanced packaging applications, utilize single exposure for the entire wafer, offer greater flexibility in the mask design and a high level of automation. The mask aligner therefore reduces overall cost of ownership and increases throughput compared with competing technologies that are more complex in design, more costly and utilize multiple exposures per wafer.

“The ability to offer our Asian-based customers a local supply of precision photomasks will lead to more cost-effective production, faster turn around and reduced overall cost of ownership,” stated James Quinn, CEO of Image Technology and general manager of the Advanced Packaging Business Unit for SUSS MicroTec. “This is an important move to further support the use of full field lithography in high volume manufacturing environments and enable SUSS to take another step towards offering a total system solution to its customers.”

“The expansion of our photomask division, Image Technology, into Taiwan just one year after our office opened in Hsin-Chu Industrial Park, is part of SUSS MicroTec´s commitment to offer complete solutions and serve customers locally,” commented Dirk Rothweiler, managing director of SUSS MicroTec Asia. “We are now able to meet growing demand for 9- inch and 14-inch photomasks in Asia, especially in Taiwan and the rapid emerging markets in China and South East Asia.”

SUSS MicroTec started its expansion into the fast growing markets in China and Taiwan with the opening of its Shanghai office last April, followed by the opening of its Taiwan facilities in Hsin-Chu in September 2001. The Taiwan facilities include a service center as well as an applications and training center equipped with the most advanced equipment from SUSS MicroTec, including mask aligners, spin coaters and the integrated clustered solutions such as the LithoPack 300 (coat, bake, expose and develop) for advanced packaging applications.

About Image Technology
Image Technology, Inc., Palo Alto, CA, is a supplier of precision photomasks for optical lithography. Photomasks are a key enabling technology in any semiconductor production. Image Technology, Inc. specializes in large area precision photomasks for advanced packaging, micro electro mechanical systems (MEMS) and opto-electronic applications taking advantage of full field lithography used in mask aligners, the main product of SUSS MicroTec. More information about Image Technology and its products is available from its web site at www.image-tec.com.

About SUSS MicroTec
SUSS MicroTec is a leading supplier of production and process technology for the semiconductor industry. SUSS MicroTec primarily services emerging markets, which are currently converting to new technologies thereby ensuring their continued ability to compete. SUSS maintains its leadership position with over 7,000 systems installed worldwide. SUSS products include coating developing systems, proximity lithography systems, substrate bonders, flip chip bonders and probe systems. Headquartered in Munich, Germany, SUSS has 1,000 employees worldwide and provides support from sales and service centers in North America, Europe, Asia and Japan. More information about SUSS MicroTec and its products is available from its web site at www.suss.com or www.suss.de.