14” Precision Photomasks for 1x 300-mm WLP Applications

  • 14”x14” Masks for 300-mm
  • High Throughput ( 2100 mm2/min.)
  • Address Grid 100nm
  • Minimum Features (L/S 4. μm)
  • CD and Linewidth Uniformity .5 μm
  • Overlay Uniformity .7 μm
  • Margin to plate edge X,Y 10mm
  • Class 10 Clean Room Chamber
  • Climate Control (20.0° C ± 0.05)
  • “CATS” Compatible with “MIC”