14” Precision Photomasks for 1x 300-mm WLP Applications
- 14”x14” Masks for 300-mm
- High Throughput ( 2100 mm²/min.)
- Address Grid 100nm
- Minimum Features (L/S 1.0 μm)
- CD and Linewidth Uniformity 0.3 μm
- Overlay Uniformity 0.35 μm
- Margin to plate edge X,Y 5mm
- Class 10 Clean Room Chamber
- Climate Control (20.0° C ± 0.05)
- “CATS” Compatible with “MIC”