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- 14x14 Masks for 300-mm
- High Throughput ( 2100 mm²/min.)
- Address Grid 100nm
- Minimum Features (L/S 1.0 μm)
- CD and Linewidth Uniformity 0.3 μm
- Overlay Uniformity 0.35 μm
- Margin to plate edge X,Y 5mm
- Class 10 Clean Room Chamber
- Climate Control (20.0° C ± 0.05)
- CATS Compatible with MIC
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