14” Precision Photomasks for 1x 300-mm WLP Applications
- 14”x14” Masks for 300-mm
- High Throughput ( 2100 mm2/min.)
- Address Grid 100nm
- Minimum Features (L/S 4. μm)
- CD and Linewidth Uniformity .5 μm
- Overlay Uniformity .7 μm
- Margin to plate edge X,Y 10mm
- Class 10 Clean Room Chamber
- Climate Control (20.0° C ± 0.05)
- “CATS” Compatible with “MIC”