LRS 200/230 Series

• Photomasks from 4” up to 9”
  
  
• High Throughput (450 mm2/min.)
  
  
• Address Grid 50nm
  
  
• Minimum Features (L/S 2 μm)
  
  
• Robotic Handling (Load-Unload)
  
  
• CD Uniformity and Overlay 100nm
  
  
• Class 1 Clean Room Chamber
  
  
• Climate Control (20 0 C ± 0.05)
  
  
• “CATS” Compatible with “MIC”