Image Technology Equipment
Area Equipment Model Mask Size (in)
 
Lithography Micronic LRS-230 5 To 9
Micronic LRS-200 4 " 9
Micronic MP-80 4 " 32
Tamarack 142 (2) 4 To 6
Tamarack 152 4 " 7
Chemical Process Steag ASP-500 MOD 9 4 To 9
Steag HMR-90 MOD 9 (2) 4 " 9
SUSS MicroTec Delta 22 4 " 14
Ameramaid MOD 32 4 " 32
Defect Inspection KLA (DD,DB) 216 HRL 4 To 7
KLA (DD) 219E (2) 4 " 7
KLA (DD,DB) 20, 221 (2) 4 " 7
LaserTec MD-2000 4 " 9
LaserTec 7MD MOD 9 4 " 9
Micromanipulator 250 MOD 14 4 To 14
Mask Repair Quantronics DRS-I 820 4 To 7
Quantronics DRS-II 840E MOD 9 (2) 4 " 9
FLOROD IMP 4 " 14
Metrology Zygo KMS-310 (2) 4 To 7
OSI VLS-100 MOD 9 (3) 4 " 9
Compumetric AMS-200 MOD 9 4 " 9
VISIONX XE 4 " 14
Leica LMS-2020 5 To 7
Leica LMS-2000 MOD 9 4 " 9
Micronic 170-GP 4 " 14
Mask Cleaning SEMITOOL PCM-328 5 To 7
Steag HMP-900 MOD 9 4 " 9
SUSS MicroTec Delta 22 4 " 14
MPT Application SUSS MicroTec RC-33 4 To 14
AST 3000 4 " 14