Area Equipment Model Mask Size (in)
Lithography Micronic
Micronic
Micronic
LRS-230
MP-80
LRS-200
5 to 9
4 to 32
4 to 9
Tamarack
Tamarack

155
142 (2)

4 to 7
4 to 6
Chemical Process SUSS
Steag
Steag
Convac
Delta 22
ASP-500 MOD 9
HMR-90 MOD 9
CPP-70
4 to 14
4 to 9
4 to 9
4 to 7
Defect Inspection LaserTec
KLA (DD,DB)
KLA
Micromanipulator
MD-2000
201,221 (2)
201 LWD
250 MOD 14 (2)
4 to 9
4 to 7
4 to 7
4 to 14
Mask Repair Quantronics
FLOROD
FLOROD
DRS-II 840E MOD 9 (2)
LFA-II
IMP
4 to 9
4 to 14
4 to 14
Metrology Zygo
VISIONX
OSI
Compumetric
KMS-310
XE
VLS-100 MOD 9 (2)
AMS-200
4 to 7
5 to 14
4 to 9
4 to 7
Leica
Nikon
LMS-2000 MOD 9
170
4 to 9
4 to 14
Mask Cleaning SUSS
Steag
SEMITOOL
Delta 22
HMP-900 MOD 9
PCM-328
4 to 14
4 to 9
5 to 7
MPT Application SUSS RC-33 4 to 14