Image Technology Equipment
| Area |
Equipment |
Model |
Mask Size (in) |
| |
| Lithography |
Micronic |
LRS-230 |
5 |
To |
9 |
| Micronic |
LRS-200 |
4 |
" |
9 |
| Micronic |
MP-80 |
4 |
" |
32 |
| Tamarack |
142 (2) |
4 |
To |
6 |
| Tamarack |
152 |
4 |
" |
7 |
| Chemical Process |
Steag |
ASP-500 MOD 9 |
4 |
To |
9 |
| Steag |
HMR-90 MOD 9 (2) |
4 |
" |
9 |
| SUSS MicroTec |
Delta 22 |
4 |
" |
14 |
| Ameramaid |
MOD 32 |
4 |
" |
32 |
| Defect Inspection |
KLA (DD,DB) |
216 HRL |
4 |
To |
7 |
| KLA (DD) |
219E (2) |
4 |
" |
7 |
| KLA (DD,DB) |
20, 221 (2) |
4 |
" |
7 |
| LaserTec |
MD-2000 |
4 |
" |
9 |
| LaserTec |
7MD MOD 9 |
4 |
" |
9 |
| Micromanipulator |
250 MOD 14 |
4 |
To |
14 |
| Mask Repair |
Quantronics |
DRS-I 820 |
4 |
To |
7 |
| Quantronics |
DRS-II 840E MOD 9 (2) |
4 |
" |
9 |
| FLOROD |
IMP |
4 |
" |
14 |
| Metrology |
Zygo |
KMS-310 (2) |
4 |
To |
7 |
| OSI |
VLS-100 MOD 9 (3) |
4 |
" |
9 |
| Compumetric |
AMS-200 MOD 9 |
4 |
" |
9 |
| VISIONX |
XE |
4 |
" |
14 |
| Leica |
LMS-2020 |
5 |
To |
7 |
| Leica |
LMS-2000 MOD 9 |
4 |
" |
9 |
| Micronic |
170-GP |
4 |
" |
14 |
| Mask Cleaning |
SEMITOOL |
PCM-328 |
5 |
To |
7 |
| Steag |
HMP-900 MOD 9 |
4 |
" |
9 |
| SUSS MicroTec |
Delta 22 |
4 |
" |
14 |
| MPT Application |
SUSS MicroTec |
RC-33 |
4 |
To |
14 |
| AST |
3000 |
4 |
" |
14 |