| Area |
Equipment |
Model |
Mask Size (in) |
| Lithography |
Micronic
Micronic
Micronic |
LRS-230
MP-80
LRS-200 |
5
to 9
4 to 32
4 to 9 |
Tamarack
Tamarack |
155
142 (2)
|
4
to 7
4 to 6 |
| Chemical Process |
SUSS
Steag
Steag
Convac |
Delta 22
ASP-500 MOD 9
HMR-90 MOD 9
CPP-70 |
4 to 14
4 to 9
4 to 9
4 to 7 |
| Defect Inspection |
LaserTec
KLA (DD,DB)
KLA
Micromanipulator |
MD-2000
201,221 (2)
201
LWD
250 MOD 14 (2) |
4
to 9
4 to 7
4 to 7
4 to 14 |
| Mask Repair |
Quantronics
FLOROD
FLOROD |
DRS-II 840E MOD 9 (2)
LFA-II
IMP |
4 to 9
4 to 14
4 to 14 |
| Metrology |
Zygo
VISIONX
OSI
Compumetric |
KMS-310
XE
VLS-100 MOD 9 (2)
AMS-200 |
4
to 7
5 to 14
4 to 9
4 to 7 |
Leica
Nikon |
LMS-2000 MOD 9
170 |
4
to 9
4 to 14 |
| Mask Cleaning |
SUSS
Steag
SEMITOOL |
Delta 22
HMP-900 MOD 9
PCM-328 |
4 to 14
4 to 9
5 to 7 |
| MPT Application |
SUSS |
RC-33 |
4 to 14 |